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Browsing University of Waterloo by Subject "Fabrication uncertainties"
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Novel MEMS Tunable Capacitors with Linear Capacitance-Voltage Response Considering Fabrication Uncertainties
(University of Waterloo, 2008-04-23)Electrostatically actuated parallel-plate MEMS tunable capacitors are desired elements for different applications including sensing, actuating and communications and RF (radio frequency) engineering for their superior ...