Browsing University of Waterloo by Subject "PolyMUMPs"
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Fabrication, Testing and Characterization of MEMS Gyroscope
(University of Waterloo, 2017-05-16)This thesis presents the design, fabrication and characterization of two Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes fabricated using the Silicon-On-Insulator-Multi-User-MEMS Process (SOIMUMPs) and Polysilicon ...