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Spatial Atomic Layer Deposition of Alumina-based Thin Film Encapsulation for High Performance Perovskite Solar Cells
dc.contributor.author | Asgarimoghaddam, Hatameh | |
dc.date.accessioned | 2023-05-25 20:02:05 (GMT) | |
dc.date.available | 2024-05-25 04:50:05 (GMT) | |
dc.date.issued | 2023-05-25 | |
dc.date.submitted | 2023-05-24 | |
dc.identifier.uri | http://hdl.handle.net/10012/19485 | |
dc.description.abstract | In this thesis, various alumina-based thin-film encapsulation layers including nitrogen-doped alumina, zinc-doped alumina and ZnO/Al2O3 nanolaminate structures are deposited by atmospheric-pressure spatial atomic layer deposition (AP-SALD) to investigate their deposition rate, microstructure, and barrier properties. Moreover, the thin-film composition is optimized to maximize the PSC long-term stability in harsh environmental conditions. | en |
dc.language.iso | en | en |
dc.publisher | University of Waterloo | en |
dc.subject | Spatial atomic layer deposition | en |
dc.subject | Thin film encapsulation | en |
dc.subject | perovskite solar cells | en |
dc.title | Spatial Atomic Layer Deposition of Alumina-based Thin Film Encapsulation for High Performance Perovskite Solar Cells | en |
dc.type | Doctoral Thesis | en |
dc.pending | false | |
uws-etd.degree.department | Mechanical and Mechatronics Engineering | en |
uws-etd.degree.discipline | Mechanical Engineering (Nanotechnology) | en |
uws-etd.degree.grantor | University of Waterloo | en |
uws-etd.degree | Doctor of Philosophy | en |
uws-etd.embargo.terms | 1 year | en |
uws.contributor.advisor | Musselman, Kevin | |
uws.contributor.affiliation1 | Faculty of Engineering | en |
uws.published.city | Waterloo | en |
uws.published.country | Canada | en |
uws.published.province | Ontario | en |
uws.typeOfResource | Text | en |
uws.peerReviewStatus | Unreviewed | en |
uws.scholarLevel | Graduate | en |