Browsing Theses by Author "Con, Celal"
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Design and Characterization of Resist and Mold Materials for Electron-Beam and Nanoimprint Lithography
Con, Celal (University of Waterloo, 2011-08-31)Electron beam lithography (EBL) and Nanoimprint Lithography (NIL) are the promising tools for today’s technology in terms of resolution capability, fidelity and cost of operation. Achieving highest possible resolution is ... -
Nanolithography on non-planar surfaces and self-assembly of metal salt-polymer nanomaterials
CON, CELAL (University of Waterloo, 2016-08-29)This thesis is focused on fabrication of high aspect ratio nanostructures on non-planar surfaces using evaporated electron beam resist (Part I), and a novel fabrication methods of high resolutionhigh-resolution surface ...