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    • Grafted polymer monolayer brush as electron beam resist 

      Yamada, Hirotaka (University of Waterloo, 2017-08-11)
      This thesis focuses on the nanofabrication process using novel electron beam resists. First, in Chapter 3 and Chapter 4, the nanofabrication process using grafted polymer monolayer brush as e-beam resist was examined. ...


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