Browsing Theses by Author "Yamada, Hirotaka"
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Grafted polymer monolayer brush as electron beam resist Yamada, Hirotaka (University of Waterloo, 2017-08-11)This thesis focuses on the nanofabrication process using novel electron beam resists. First, in Chapter 3 and Chapter 4, the nanofabrication process using grafted polymer monolayer brush as e-beam resist was examined. ...