Browsing Theses by Author "Seleim, Abdulrahman Saad"
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Design and Implementation of a Controller for an Electrostatic MEMS Actuator and Sensor
Seleim, Abdulrahman Saad (University of Waterloo, 2010-05-21)An analog controller has been analyzed and built for an electrostatic micro-cantilever beam. The closed loop MEMS device can be used as both actuator and sensor. As an actuator it will have the advantage of large stable ...