Browsing Theses by Author "Lee, Geoffrey"
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Design, Fabrication and Validation of a CMOS-MEMS Kelvin Probe Force Microscope
Lee, Geoffrey (University of Waterloo, 2013-04-25)The Kelvin Probe Force Microscope is a type of scanning probe instrument that is used to discern the different work functions of a sample. A sharp probe at the end of a cantilever is lowered onto a substrate where electrostatic ...