Browsing Theses by Subject "polysilicon"
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Effect of phosphorus doping on Young's modulus and residual stress of polysilicon thin films
(University of Waterloo, 2010-08-31)On-chip characterization devices have been used to extract the Young’s modulus, average stress and stress gradient of polysilicon doped with phosphorus using thermal diffusion. Devices for extracting the Young’s modulus, ...