Browsing Theses by Subject "reactive ion etching"
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Fabrication of High Solid Silicon Microneedles Based on Anisotropic Etching by Potassium Hydroxide
(University of Waterloo, 2023-06-13)This thesis presents the research on the high solid silicon microneedles fabrication based on KOH anisotropic etching, aiming at finding a controllable way to fabricate 500 μm high microneedles with good height uniformity ...