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Browsing Theses by Subject "wafer bonding"
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Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Humidity Sensing
(University of Waterloo, 2019-09-11)In the last two decades, capacitive micromachined ultrasonic transducers (CMUTs) have proven themselves to be promising for various ultrasound imaging and chemical sensing applications. Although holding many benefits for ...