Browsing Mechanical and Mechatronics Engineering by Author "Kao, Manfred"
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In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system.
Mistry, Kissan; Jones, Alex; Kao, Manfred; Yeow, Travis; Yavuz, Mustafa; Musselman, Kevin (IOP Science, 2020-06-01)Atmospheric pressure—spatial atomic layer deposition (AP-SALD) is a promising open-air deposition technique for high-throughput manufacturing of nanoscale films, yet the nucleation and property evolution in these films has ... -
An Intelligent Neural Network Controlled Atmospheric Pressure Spatial Atomic Layer Deposition System for Tunable Metal Oxide Thin Films
Kao, Manfred (University of Waterloo, 2018-08-22)Atmospheric pressure spatial atomic layer deposition (AP-SALD) is a novel thin film fabrication technique to create conformal and pin-hole free films. The growth rate of AP-SALD is hundreds of times greater than conventional ...