Browsing Mechanical and Mechatronics Engineering by Author "Loke, Jhi Yong"
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Computational Fluid Dynamics and 3D Printing towards Nanoscale Thickness Gradients and Scale-up of a Spatial Atomic Layer Deposition System
Loke, Jhi Yong (University of Waterloo, 2020-12-15)Nanoscale functional thin films are integral part of all modern devices. As these devices continue to miniaturize in feature size, better control of film thickness and quality is needed. Atomic Layer Deposition (ALD) is ...