Browsing Mechanical and Mechatronics Engineering by Subject "Nanoimprint Lithography"
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Design and Characterization of Resist and Mold Materials for Electron-Beam and Nanoimprint Lithography
(University of Waterloo, 2011-08-31)Electron beam lithography (EBL) and Nanoimprint Lithography (NIL) are the promising tools for today’s technology in terms of resolution capability, fidelity and cost of operation. Achieving highest possible resolution is ...