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Browsing Mechanical and Mechatronics Engineering by Subject "Packaging optical devices"
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SIMULTANEOUS SENSING OF PRESSURE AND TEMPERATURE USING A SELF-TEMPERATURE-COMPENSATED FABRY–PÉROT MEMS MECHANISM
(University of Waterloo, 2022-09-01)This thesis presents the design and development of a self-temperature-compensated sensor for measuring temperature and pressure in harsh environments using a combination of Fabry–Pérot interferometry and microelectromechanical ...