Browsing Mechanical and Mechatronics Engineering by Subject "SALD"
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Advancing the Industrialization of Thin Film Deposition: Tools for Mitigating Powder Formation in Spatial-ALD Systems and for Real-time, In-situ Metrology
(University of Waterloo, 2024-01-11)Thin-film manufacturing through Spatial Atomic Layer Deposition (SALD) offers high throughput and cost-saving advantages, but challenges such as powder formation and the lack of real-time in-situ metrology hinder its ... -
Development of a Novel Commercial-Scale Atmospheric Pressure Spatial Atomic Layer Deposition System
(University of Waterloo, 2020-09-09)Atmospheric pressure spatial atomic layer deposition (AP-SALD) is an advanced thin-film fabrication technique. It can produce high quality (uniform, conformal, pin-hole free), large-area ultrathin films at speeds up to ...