Browsing Mechanical and Mechatronics Engineering by Subject "Spatial atomic layer deposition"
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Spatial Atomic Layer Deposition of Alumina-based Thin Film Encapsulation for High Performance Perovskite Solar Cells
(University of Waterloo, 2023-05-25)In this thesis, various alumina-based thin-film encapsulation layers including nitrogen-doped alumina, zinc-doped alumina and ZnO/Al2O3 nanolaminate structures are deposited by atmospheric-pressure spatial atomic layer ...