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Browsing Mechanical and Mechatronics Engineering by Subject "X-ray photoelectron spectroscopy"
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Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
(AIP Publishing, 2018-03-21)In this work, a plasma assisted atomic layer deposition system was used to deposit nitrogen-doped titanium dioxide. A simple approach was developed that requires only a nitrogen plasma and short plasma exposure times to ...