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    • MEMS Demodulator Based on Electrostatic Actuator 

      Chung, So-Ra (Serena) (University of Waterloo, 2013-01-25)
      This thesis provides analysis and modeling for one of the Micro-Eletro-Mechanical System (MEMS) electrostatic actuator that consists of a micro-plate at the end of a cantilever beam, and introduces different type of MEMS ...


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